| 보유대학 | 성균관대학교 |
|---|---|
| 제작사 | KSM |
| 모델 | 주문제작 |
- 장비설명 : Simple intuitive control. User interface features a bright digital alpha numeric display.
Controller has built-in diagnostics complete parameter verification and memory for up to 10 user defined recipes and
GEM/SECS Ⅱ protocol is offered as an option. Unvaled quality and reliability. The highest quality components
Electropolished stainless steel chamber brushless DC motor damped actuation valves and a static reduction unit.
Reliable low maintenance design guaranteed to deliver over 95 uptime and proven at 99.
Process control. Built in DI water rinse resistivity monitoring makes the cleaning process automatic and reliable.
Multi-Configurations. Accommodates products up to 360mm round or 400mm square.
Extremely small p개file - smallest footprint-to-throughput ratio of an spin rinser/dryer on the market today.
Uses as little as three gallon of cold DI water per load.
Easy to maintain form service chase or clean room